The continuing progression of miniaturization technology for electronic devices has brought us into the nano regime. In our daily lives, we are using nanodevices, which consist of artificial nanostructures less than 100 nanometers in size. To fabricate these nanodevices accurately, we have to measure at the nanometer scale various values, such as length and resistivity. Despite the importance of nanoscale measurement technology, or nanometrology, we have only limited solutions. New metrological methods are now urgently required for the further development and improvement of nanodevices. Recently, new tools for nanometrology have been developed.